Flow Control

• Industry-best range of digital mass flow meters and other products to meet widest application needs
• MultiFlo™ technology allows one device to change gas types and ranges without removing the device from the system and improving actual process gas accuracy. MultiFlo™ is offered for use with thermal thermal mass or flow sensors
• Complete product range includes both elastomer sealed and metal sealed options for thermal mass flow sensors and coriolis mass flow sensors
• Ultra-high purity mass flow sensors and devices engineered to satisfy thin film, semiconductor and other high-tech industry requirements

KEY APPLICATIONS

• Heat treating, cutting and other thermal processes for mass flow sensors
  
• Semiconductor and LED production tools
  
• Thin film deposition systems
  
• Biopharmaceutical bioreactors
  
• Petrochemical and chemical gas and liquid pilot plants
• Purge gas, process analysis and analytical flow measurement