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Iwaki Pneumatic drive bellows pumps FS-100HT2
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10 Mar 2020
Japan
1 Unit
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Spesifikasi

Pompa Air

Features of FS-100HT2

Enhanced cleaning efficiency
Cleaning efficiency such as the removal of particles and metal contamination on wafers is improved as the circulation flow rate is increased. Cleaning times resulting from increased number of processing lines will also be reduced due to higher circulation rate.
Contamination-free
In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing.
Reduced installation area
In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing
Weight saving
Optimization of design has resultind in reduced weight of about 15% of our existing 80-100L models making installation and replacement work easier.

Specifications

Max. discharge capacity100 L/min
Max. supplied air pressure0.5 MPa
Max. stroke speed120 spm
Main materialsPTFE, PFA
Liquid temperature range10 – 180˚C

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